Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

نویسندگان

  • T. Beauchêne
  • Dean Lewis
  • Felix Beaudoin
  • Vincent Pouget
  • Romain Desplats
  • Pascal Fouillat
  • Philippe Perdu
  • Marise Bafleur
  • David Trémouilles
چکیده

This paper presents an experimental comparison of laser beam based techniques applied to a case study concerning ESD defect location. Thermal laser stimulation and non-biased optical beam induced current techniques are evaluated and discussed. Experimental results demonstrate the advantages and weak points of the two approaches. 2003 Elsevier Science Ltd. All rights reserved.

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عنوان ژورنال:
  • Microelectronics Reliability

دوره 43  شماره 

صفحات  -

تاریخ انتشار 2003