Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization
نویسندگان
چکیده
This paper presents an experimental comparison of laser beam based techniques applied to a case study concerning ESD defect location. Thermal laser stimulation and non-biased optical beam induced current techniques are evaluated and discussed. Experimental results demonstrate the advantages and weak points of the two approaches. 2003 Elsevier Science Ltd. All rights reserved.
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 43 شماره
صفحات -
تاریخ انتشار 2003